Persistent photoconductivity as a tool for monitoring oxide cluster concentration in silicon wafers
Y. Haddab, D. Manic, R.S. PopovicVolume:
38
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0026-2714(97)00231-x
File:
PDF, 191 KB
english, 1998