A Novel Self-Aligned Field Induced Drain Polycrystalline...

MRS Proceedings 2006 / 1 Vol. 910

A Novel Self-Aligned Field Induced Drain Polycrystalline Silicon Thin Film Transistor Fabricated by using a Selective Side Etch Process

Liao, Ta-Chuan, Wu, Chun-Yu, Chien, Feng-Tso, Tsai, Chun-Chien, Chen, Hsiu-Hsin, Kung, Chung-Yuan, Cheng, Huang-Chung
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Volume:
910
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0910-A22-11
Date:
January, 2006
File:
PDF, 356 KB
english, 2006
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