A new failure mechanism by corrosion of tungsten in a...

A new failure mechanism by corrosion of tungsten in a tungsten plug process

S. Bothra, H. Sur, V. Liang
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Volume:
39
Year:
1999
Language:
english
Pages:
10
DOI:
10.1016/s0026-2714(98)00191-7
File:
PDF, 967 KB
english, 1999
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