Frequency dependence of the lifetime of a surface...

Microelectronics Reliability 1999 Vol. 39; Iss. 3

Frequency dependence of the lifetime of a surface micromachined microengine driving a load

Danelle M Tanner, William M Miller, Ken A Peterson, Michael T Dugger, William P Eaton, Lloyd W Irwin, Donna C Senft, Norman F Smith, Paiboon Tangyunyong, Samuel L Miller
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Volume:
39
Year:
1999
Language:
english
Pages:
14
DOI:
10.1016/s0026-2714(98)00248-0
File:
PDF, 1.73 MB
english, 1999
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