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Failure modes in surface micromachined microelectromechanical actuation systems
S.L Miller, M.S Rodgers, G La Vigne, J.J Sniegowski, P Clews, D.M Tanner, K.A PetersonVolume:
39
Year:
1999
Language:
english
Pages:
9
DOI:
10.1016/s0026-2714(99)00013-x
File:
PDF, 234 KB
english, 1999