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Depassivation of latent plasma damage in pMOS devices
L. Pantisano, A. Paccagnella, P. Colombo, M.G. ValentiniVolume:
39
Year:
1999
Language:
english
Pages:
6
DOI:
10.1016/s0026-2714(99)00108-0
File:
PDF, 396 KB
english, 1999