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Influence of interfaces on electrical characteristics formation in monocrystalline silicon–noncrystalline ultrathin oxide – polycrystalline silicon structures
V.Ya. Uritsky, A.P. KrylovVolume:
40
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0026-2714(99)00276-0
File:
PDF, 90 KB
english, 2000