Reliability of ultra-thin N2O-nitrided oxides grown by RTP under low pressure and in different gas atmospheres
M Beichele, A.J Bauer, H RysselVolume:
40
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0026-2714(99)00287-5
File:
PDF, 201 KB
english, 2000