A novel method for the deposition of Si–SiO2 superlattices
F Gourbilleau, P Voivenel, X Portier, R RizkVolume:
40
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0026-2714(99)00334-0
File:
PDF, 216 KB
english, 2000