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pH and Down Load Effects on Silicon Dioxide Dielectric CMP
Choi, Wonseop, Lee, Seung-Mahn, Singh, Rajiv K.Volume:
7
Year:
2004
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1738472
File:
PDF, 64 KB
english, 2004