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[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - HF Vapor Release Assessment to Address NEMS Applications

Lachal, Laurent, Auclair, Sylvain, Lavios, Pascal, Finet, Jean-Marc, Assidi, Roselyne, Klein, Mouna, Vaudaine, Marie-Hélène, Delaguillaumie, Fanny, Marcoux, Carine, Andreucci, Philippe, Grange, Hube
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Volume:
16
Year:
2008
Language:
english
DOI:
10.1149/1.2992226
File:
PDF, 648 KB
english, 2008
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