Organic Oxidants for Chemical Mechanical Planarization

Electrochemical and Solid-State Letters 2009 Vol. 12; Iss. 1

Organic Oxidants for Chemical Mechanical Planarization

de Rege, Francis, Yang, Pengxiang, Grumbine, Steven, Aggio, Jason, Martin, Roger, Brusic, Vlasta
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Volume:
12
Year:
2009
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3012263
File:
PDF, 238 KB
english, 2009
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