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Laser diode interferometer used for measuring displacements in large range with a nanometer accuracy
Xuefeng Wang, Xiangzhao Wang, Hongbin Lu, Feng Qian, Yang BuVolume:
33
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0030-3992(01)00027-5
File:
PDF, 130 KB
english, 2001