Analysis of the Al content in semiconductor materials by null ellipsometric spectrometry
Jie Lian, Qingpu Wang, Aijian Wei, Yurong Wang, Ping LiVolume:
34
Year:
2002
Language:
english
Pages:
4
DOI:
10.1016/s0030-3992(02)00048-8
File:
PDF, 99 KB
english, 2002