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LiCaAlF6:Nd3+ crystal as optical material for 157 nm photolithography
E Sarantopoulou, Z Kollia, A.C CefalasVolume:
177
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0030-4018(00)00588-5
File:
PDF, 109 KB
english, 2000