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Novel micromachined membrane mirror characterization and closed-loop demonstration
David C. Dayton, Justin D. Mansell, John D. Gonglewski, Sergio R. RestainoVolume:
200
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0030-4018(01)01629-7
File:
PDF, 255 KB
english, 2001