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Fabrication of high-efficiency multilayer-coated binary blazed gratings in the EUV regime
Patrick P Naulleau, Erik H Anderson, Eric M Gullikson, Jeffrey BokorVolume:
200
Year:
2001
Language:
english
Pages:
8
DOI:
10.1016/s0030-4018(01)01647-9
File:
PDF, 577 KB
english, 2001