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Nucleation Behavior-Morphology-Resistivity of Atomic Layer Deposited Pt on Atomic Layer Deposited Yttria-Stabilized Zirconia Films
Xu, R., Selvaraj, S. K., Jursich, G., Feinerman, A., Takoudis, C.Volume:
2
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.017311jss
Date:
August, 2013
File:
PDF, 984 KB
english, 2013