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Rutherford Backscattering Spectrometry Analysis of Growth Rate and Activation Energy for Self-formed Ti-rich Interface Layers in Cu(Ti)/Low-k Samples
Kohama, Kazuyuki, Ito, Kazuhiro, Mori, Kenichi, Maekawa, Kazuyoshi, Shirai, Yasuharu, Murakami, MasanoriVolume:
1156
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1156-D04-09
Date:
January, 2009
File:
PDF, 703 KB
english, 2009