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Nanograting Fabrication on the Surface of Silicon and Gallium Arsenide Using Femtosecond Laser Pulses
Kim, Dae-jin, Kim, Tae-hong, Jang, Woo-young, Lim, Ki-Soo, Lee, Myeongkyu, Sohn, Ik-BuVolume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.06GG11
Date:
June, 2011
File:
PDF, 753 KB
english, 2011