Low Temperature Selected Area Re-Growth of Ohmic Contacts...

MRS Proceedings 2005 / 1 Vol. 892

Low Temperature Selected Area Re-Growth of Ohmic Contacts for III-N FETs

Saripalli, Yoganand, Zeng, Chang, Jin, Yawei, Long, Joseph P, Grenko, Judith A, Dandu, Krishnanshu, Johnson, Mark A.L, Barlage, Doug W
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Volume:
892
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0892-FF16-01
Date:
January, 2005
File:
PDF, 185 KB
english, 2005
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