Sub-nanometer metrology of chirped phase masks by optical Moiré
F Barnier, P.E Dyer, H.V Snelling, R.M De la RueVolume:
170
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0030-4018(99)00461-7
File:
PDF, 2.13 MB
english, 1999