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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Geometry Dependence of Poly-Si Oxidation and its Application to Self-Align, Maskless Process for Nano-scale Vertical CMOS Structures
Cho, Hoon, Kapur, Pawan, Kalavade, Pranav, Saraswat, KrishnaVolume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2356300
File:
PDF, 1.02 MB
english, 2006