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Rendering SU-8 hydrophilic to facilitate use in micro channel fabrication
Nordström, Maria, Marie, Rodolphe, Calleja, Montserrat, Boisen, AnjaVolume:
14
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/14/12/003
Date:
December, 2004
File:
PDF, 143 KB
english, 2004