![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE Scanning Microscopy - Monterey, CA (Monday 4 May 2009)] Scanning Microscopy 2009 - Monte Carlo simulation to determine the measurement uncertainty of a metrological scanning probe microscope measurement
Kreutzer, Ph., Postek, Michael T., Newbury, Dale E., Dorozhovets, N., Manske, E., Platek, S. Frank, Joy, David C., Füßl, R., Jäger, G., Grünwald, R.Volume:
7378
Year:
2009
Language:
english
DOI:
10.1117/12.821794
File:
PDF, 562 KB
english, 2009