Purity of Ion Beams: Analysis and Simulation of Mass...

Advances in Materials Science and Engineering 2012 Vol. 2012

Purity of Ion Beams: Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation

Häublein, Volker, Ryssel, Heiner, Frey, Lothar
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Volume:
2012
Year:
2012
Language:
english
Journal:
Advances in Materials Science and Engineering
DOI:
10.1155/2012/610150
File:
PDF, 860 KB
english, 2012
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