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SPIE Proceedings [SPIE OPTO Ireland - Galway, Ireland (Thursday 5 September 2002)] Opto-Ireland 2002: Optics and Photonics Technologies and Applications - Study of femtosecond laser interaction with wafer-grade silicon
Coyne, Edward, Magee, Jonathan, Mannion, Paul, O'Connor, Gerard M., Glynn, Thomas J.Volume:
4876
Year:
2003
Language:
english
DOI:
10.1117/12.463752
File:
PDF, 1.55 MB
english, 2003