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SPIE Proceedings [SPIE SPIE OPTO: Integrated Optoelectronic Devices - San Jose, CA (Saturday 24 January 2009)] Zinc Oxide Materials and Devices IV - ICP etching of ZnO in BCl3/SF6 gas mixtures
Nordheden, Karen J., Pathak, Bogdan A., Alexander, John L., Teherani, Ferechteh H., Litton, Cole W., Rogers, David J.Volume:
7217
Year:
2009
Language:
english
DOI:
10.1117/12.817016
File:
PDF, 194 KB
english, 2009