SPIE Proceedings [SPIE SPIE OPTO: Integrated Optoelectronic...

  • Main
  • SPIE Proceedings [SPIE SPIE OPTO:...

SPIE Proceedings [SPIE SPIE OPTO: Integrated Optoelectronic Devices - San Jose, CA (Saturday 24 January 2009)] Zinc Oxide Materials and Devices IV - ICP etching of ZnO in BCl3/SF6 gas mixtures

Nordheden, Karen J., Pathak, Bogdan A., Alexander, John L., Teherani, Ferechteh H., Litton, Cole W., Rogers, David J.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
7217
Year:
2009
Language:
english
DOI:
10.1117/12.817016
File:
PDF, 194 KB
english, 2009
Conversion to is in progress
Conversion to is failed