[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Formation and Characterization of Thin Silicon Dioxide Films Obtained by Inductively-Coupled High-Density Plasmas using a Dual Rotated Spiral Antenna System
Kim, Yil Wook, Woo, Sang Ho, Kim, Hai-Won, Um, Pyung Yong, Ji, Jung-Min, Kim, Chang-KooYear:
2009
Language:
english
DOI:
10.1149/1.3206617
File:
PDF, 321 KB
english, 2009