[ECS 216th ECS Meeting - Vienna, Austria (October 4 -...

  • Main
  • [ECS 216th ECS Meeting - Vienna,...

[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Formation and Characterization of Thin Silicon Dioxide Films Obtained by Inductively-Coupled High-Density Plasmas using a Dual Rotated Spiral Antenna System

Kim, Yil Wook, Woo, Sang Ho, Kim, Hai-Won, Um, Pyung Yong, Ji, Jung-Min, Kim, Chang-Koo
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2009
Language:
english
DOI:
10.1149/1.3206617
File:
PDF, 321 KB
english, 2009
Conversion to is in progress
Conversion to is failed