Remote Plasma ALD of SrTiO[sub 3] Using...

Journal of The Electrochemical Society 2011 Vol. 158; Iss. 2

Remote Plasma ALD of SrTiO[sub 3] Using Cyclopentadienlyl-Based Ti and Sr Precursors

Langereis, E., Roijmans, R., Roozeboom, F., van de Sanden, M. C. M., Kessels, W. M. M.
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Volume:
158
Year:
2011
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3522768
File:
PDF, 531 KB
english, 2011
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