Optimization of the GaAs-on-Si Substrate for...

Materials 2012 / 12 Vol. 5; Iss. 12

Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application

Shi, Yunbo, Guo, Hao, Ni, Haiqiao, Xue, Chenyang, Niu, Zhichuan, Tang, Jun, Liu, Jun, Zhang, Wendong, He, Jifang, Li, Mifeng, Yu, Ying
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Volume:
5
Language:
english
Journal:
Materials
DOI:
10.3390/ma5122917
Date:
December, 2012
File:
PDF, 387 KB
english, 2012
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