The Role of Mobile Charge in Oxygen Plasma-Enhanced...

Electrochemical and Solid-State Letters 2010 Vol. 13; Iss. 6

The Role of Mobile Charge in Oxygen Plasma-Enhanced Silicon-to-Silicon Wafer Bonding

Raeissi, B., Sanz-Velasco, A., Engström, O.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
13
Year:
2010
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3355288
File:
PDF, 190 KB
english, 2010
Conversion to is in progress
Conversion to is failed