MOLECULAR APPROACH TO MATERIAL DETACHMENT MECHANISM DURING CHEMICAL MECHANICAL PLANARIZATION
Zhang, Ruqin, Wang, Xiaoping, Shrotriya, Pranav, Biswas, Rana, Bastawros, Ashraf, Chandra, AbhijitVolume:
11
Language:
english
Journal:
Machining Science and Technology
DOI:
10.1080/10910340701700799
Date:
December, 2007
File:
PDF, 879 KB
english, 2007