Development of Nanometrology for Nanoelectronics: Growth...

Key Engineering Materials 2008 Vol. 381-382

Development of Nanometrology for Nanoelectronics: Growth and Characterization of Transition Metal Monolayer Films on Silicon

Plusnin, N.I., Il'yashenko, W.M., Kitan, S.A., Krylov, S.V.
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Volume:
381-382
Year:
2008
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.381-382.529
File:
PDF, 1.12 MB
english, 2008
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