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Depth profiling of low energy ion implantations in Si and Ge by means of micro-focused grazing emission X-ray fluorescence and grazing incidence X-ray fluorescence
Kayser, Yves, Hönicke, Philipp, Banaś, Dariusz, Dousse, Jean-Claude, Hoszowska, Joanna, Jagodziński, Paweł, Kubala-Kukuś, Aldona, Nowak, Stanisław H., Pajek, MarekVolume:
30
Year:
2015
Language:
english
Journal:
J. Anal. At. Spectrom.
DOI:
10.1039/c4ja00461b
File:
PDF, 1.35 MB
english, 2015