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ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Evaluation of Narrow Gap Filling Ability in Shallow Trench Isolation by Organosiloxane Sol-Gel Precursor
Watanuki, Kohei, Inokuchi, Atsutoshi, Banba, Akinori, Manabe, Nobuyuki, Suzuki, Hirokazu, Koike, Tadashi, Adachi, Tastuhiko, Goto, Tetsuya, Teramoto, Akinobu, Shirai, Yasuyuki, Sugawa, Shigetoshi, OhmYear:
2010
Language:
english
DOI:
10.1149/1.3481600
File:
PDF, 2.19 MB
english, 2010