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Electron heating during E-H transition in inductively coupled RF plasmas
Wegner, Th, Küllig, C, Meichsner, JVolume:
24
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/24/4/044001
Date:
August, 2015
File:
PDF, 6.41 MB
english, 2015