Selective etching of focused gallium ion beam implanted...

Selective etching of focused gallium ion beam implanted regions from silicon as a nanofabrication method

Han, Zhongmei, Vehkamäki, Marko, Mattinen, Miika, Salmi, Emma, Mizohata, Kenichiro, Leskelä, Markku, Ritala, Mikko
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Volume:
26
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/26/26/265304
Date:
July, 2015
File:
PDF, 2.01 MB
english, 2015
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