[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Critical angle of channeling for low energy ion implantation
Jeong-Youb Lee,, Jung-Ho Lee,, Kil-Ho Lee,, Sahng-Kyoo Lee,, Cai, G.N., Erokhin, Y.Volume:
2
Year:
1998
Language:
english
DOI:
10.1109/IIT.1998.813768
File:
PDF, 359 KB
english, 1998