Fabrication of metallic patterns by microstencil lithography on polymer surfaces suitable as microelectrodes in integrated microfluidic systems
Takano, Nao, Doeswijk, Lianne M, Boogaart, Marc A F van den, Auerswald, Janko, Knapp, Helmut F, Dubochet, Olivier, Hessler, Thomas, Brugger, JürgenVolume:
16
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/16/8/023
Date:
August, 2006
File:
PDF, 1.38 MB
english, 2006