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Optical emission spectroscopic investigation of hydrogen plasma used for modification of electrical properties of multi-crystalline silicon
Darwiche, S, Nikravech, M, Awamat, S, Morvan, D, Amouroux, JVolume:
40
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/40/4/017
Date:
February, 2007
File:
PDF, 540 KB
english, 2007