Thermal Stability and Electrical Resistivity of SiTaN[sub...

Journal of The Electrochemical Society 2006 Vol. 153; Iss. 7

Thermal Stability and Electrical Resistivity of SiTaN[sub x] Heating Layer for Phase-Change Memories

Cheng, Huai-Yu, Chen, Yi-Chen, Lee, Chain-Ming, Chung, Ren-Jei, Chin, Tsung-Shune
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Volume:
153
Year:
2006
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2196727
File:
PDF, 1.15 MB
english, 2006
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