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Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility
Yasui, Shinji, Shojo, Tadashi, Inoue, Goichi, Koike, Kunihiko, Takeuchi, Akihiro, Iwasa, YoshioVolume:
2012
Year:
2012
Language:
english
Journal:
International Journal of Chemical Engineering
DOI:
10.1155/2012/329419
File:
PDF, 2.24 MB
english, 2012