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A Silicon Texturing Technique Based on Etching Through a Liquid-Phase Deposited Oxide Mask
Esfandiarpour, Behzad, Sivoththaman, SivaVolume:
13
Year:
2010
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3491294
File:
PDF, 603 KB
english, 2010