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Potassium Bromate as an Oxidizing Agent in a Titania-Based Ru CMP Slurry
Victoria, S. Noyel, Sharma, Pranav P., Suni, Ian Ivar, Ramanathan, S.Volume:
13
Year:
2010
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3481948
File:
PDF, 149 KB
english, 2010