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Focused ion beam/lift-out transmission electron microscopy cross sections of block copolymer films ordered on silicon substrates
H White, Y Pu, M Rafailovich, J Sokolov, A.H King, L.A Giannuzzi, C Urbanik-Shannon, B.W Kempshall, A Eisenberg, S.A Schwarz, Y.M StrzhemechnyVolume:
42
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0032-3861(00)00503-6
File:
PDF, 477 KB
english, 2001