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Synthesis and characterization of norbornene-based polymers with 7,7-dimethyloxepan-2-one acid labile groups for chemically amplified photoresists
Jin-Baek Kim, Jae-Jun LeeVolume:
43
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0032-3861(01)00750-9
File:
PDF, 245 KB
english, 2002