SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Metrology, Inspection, and Process Control for Microlithography XXVI - Characterization of ultrathin films by laser-induced sub-picosecond photoacoustics with coherent extreme ultraviolet detection
Li, Qing, Hoogeboom-Pot, Kathleen, Nardi, Damiano, Deeb, Chris, King, Sean, Tripp, Marie, Anderson, Erik, Murnane, Margaret M., Kapteyn, Henry C., Starikov, AlexanderVolume:
8324
Year:
2012
Language:
english
DOI:
10.1117/12.916866
File:
PDF, 361 KB
english, 2012