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A novel positive photosensitive polybenzoxazole precursor for microelectronic applications
Steve Lien-Chung Hsu, Wan-Chi ChenVolume:
43
Year:
2002
Language:
english
Pages:
8
DOI:
10.1016/s0032-3861(02)00635-3
File:
PDF, 416 KB
english, 2002