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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Precise Control of Annealed Wafer For Nanometer Devices
Matsushita, Yoshiaki, Nagahama, Hiromi, Takeda, Ryuji, Hirasawa, ManabuVolume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2355754
File:
PDF, 599 KB
english, 2006